Soi cmos circuits with substrate bias

ABSTRACT

The present invention relates to methods and devices for reducing the threshold voltage difference between an n-type field effect transistor (n-FET) and a p-type field effect transistor (p-FET) in a complementary metal-oxide-semiconductor (CMOS) circuit located on a silicon-on-insulator (SOI) substrate. Specifically, a substrate bias voltage is applied to the CMOS circuit for differentially adjusting the threshold voltages of the n-FET and the p-FET. For example, a positive substrate bias voltage can be used to reduce the threshold voltage of the n-FET but increase that of the p-FET, while a negative substrate bias voltage can be used to increase the threshold voltage of the n-FET but reduce that of the p-FET. Further, two or more substrate bias voltages of different magnitudes and/or directions can be used for differentially adjusting the n-FET and p-FET threshold voltages in two or more different CMOS circuits or groups of CMOS circuits.

RELATED APPLICATIONS

This application is a divisional of U.S. patent application Ser. No.11/329,643, filed Jan. 11, 2006.

FIELD OF THE INVENTION

The present invention relates to methods and devices for reducing thethreshold voltage difference between n-type field effect transistors(n-FETs) and p-type field effect transistors (p-FETs) in complementarymetal-oxide-semiconductor (CMOS) circuits fabricated onsemiconductor-on-insulator (SOI) substrates.

BACKGROUND OF THE INVENTION

In CMOS circuits, it is desirable to tune the threshold voltages of then-FET devices and the p-FET devices to achieve substantially the samemagnitude, which provides a balance between the n-FET and p-FET drivecurrents and, in turn, leads to improved device performance and circuitspeed.

However, actual n-FET and p-FET threshold voltages in a CMOS circuit canbe different due to various reasons. For example, if the n-FETs and thep-FETs contain metal or metal silicide gate electrodes, their thresholdvoltages will be significantly different, because the work function ofmetal or metal silicide is asymmetric with respect to the n-FETs andp-FETs. Although differentially doped polysilicon electrodes can be usedin place of metal or metal silicide electrodes to reduce the thresholdvoltage differential between n-FETs and p-FETs, the process variationsfor n-FETs and p-FETs may affect the threshold voltages of the n-FETsand p-FETs differently, therefore still resulting in a certain degree ofthreshold voltage imbalance therebetween. Further, depending on specifictransistor designs, the threshold voltages of n-FETs and p-FETs may havedifferent temperature sensitivities. Thus, even if the thresholdvoltages are balanced at room temperature, imbalance may be generatedsubsequently during operation, because the operating temperature of theintegrated circuit (IC) chip is typically 60-80 degrees higher than roomtemperature.

There is therefore a need for dynamic, post-fabrication adjustment ofthe threshold voltages of the n-FETs and p-FETs in a CMOS circuit inorder to reduce the threshold voltage difference therebetween or morepreferably, to achieve a substantial threshold voltage balance.

SUMMARY OF THE INVENTION

The present invention employs a substrate bias voltage to reduce thethreshold voltage difference between n-FETs and p-FETs in a CMOScircuit, based on the differential impacts of the substrate bias voltageon the threshold voltages of the n-FETs and p-FETs.

In one aspect, the present invention relates to a method that comprises:

fabricating at least one CMOS circuit on a semiconductor-on-insulator(SOI) substrate, wherein the at least one CMOS circuit comprises atleast one n-FET and at least one p-FET;applying a substrate bias voltage to the at least one CMOS circuit so asto reduce the difference between the threshold voltage of the at leastone n-FET and the threshold voltage of the at least one p-FET by atleast 5%.

The term “substrate bias voltage” as used herein refers to thedifference between the voltage applied to the semiconductor substrate onwhich a CMOS circuit is located and the voltage applied to the sourceregion of at least one n-FET device in the CMOS circuit.

Preferably, the substrate bias voltage applied to the CMOS circuitfunctions to reduce the threshold voltage difference between the n-FETand the p-FET by at least 20%, more preferably by at least 50%, and mostpreferably by at least 95%.

The gate electrodes of the at least one n-FET and the at least one p-FETin the CMOS circuit may comprise either doped polysilicon or metallicmaterials. In one specific embodiment of the present invention, both theat least one n-FET and the at least one p-FET in the CMOS circuitcomprise metallic gate electrodes. In an alternative embodiment of thepresent invention, the at least one n-FET comprises an n-dopedpolysilicon gate electrode, and the at least one p-FET comprises ap-doped polysilicon gate electrode. In a still further alternativeembodiment of the present invention, one of the at least one n-FET andthe at least one p-FET comprises a doped polysilicon gate electrode, andthe other comprises a metallic gate electrode.

The term “metallic” as used herein refers to a structure or componentthat is formed essentially of a conductive material containing at leastone metal in an elemental form, an alloy form, or a compound form.Examples of such conductive material include, but are not limited to:elemental metals, metal alloys, metal nitrides, metal silicides, etc.

In another aspect, the present invention relates to a semiconductordevice comprising:

at least one CMOS circuit located on a SOI substrate, wherein said atleast one CMOS circuit comprises at least one n-FET and at least onep-FET, andat least one voltage applicator for applying a substrate bias voltage tothe at least one CMOS circuit so as to reduce the difference between thethreshold voltage of the at least one n-FET and the threshold voltage ofthe at least one p-FET by at least 5%.

Other aspects, features and advantages of the invention will be morefully apparent from the ensuing disclosure and appended claims.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows the channel current (Id) response curves for an n-FETdevice and a p-FET device, which are plotted as a function of the gatevoltages (Vgs) at different substrate bias voltages.

FIG. 2 shows the threshold voltage shifts exhibited by the n-FET deviceand the p-FET device at different substrate bias voltages.

FIG. 3 shows the ring oscillator speed enhancement (or delayimprovement) plotted for a CMOS circuit as a function of substrate biasvoltages at different power supply voltages.

FIG. 4 shows the ring oscillator stand-by current (Iddq) plotted for theCMOS circuit as a function of substrate bias voltages at different powersupply voltages.

FIG. 5 shows an exemplary semiconductor device comprising two CMOScircuits located in a SOI substrate, while a common substrate biasvoltage is applied to a base substrate layer of the SOI substrate,according to one embodiment of the present invention.

FIG. 6 shows an exemplary semiconductor device comprising two CMOScircuits located in a SOI substrate and over two n-type wells in ap-doped base substrate layer, while two positive bias voltages ofdifferent magnitudes are applied to the two n-type wells, according toone embodiment of the present invention.

FIG. 7 shows an exemplary semiconductor device comprising two CMOScircuits located in a SOI substrate and over two p-type wells in ann-doped base substrate layer, while two negative bias voltages ofdifferent magnitudes are applied to the two p-type wells, according toone embodiment of the present invention.

FIG. 8 shows an exemplary semiconductor device comprising two CMOScircuits located over two electrically isolated substrate regions in aSOI substrate, while two bias voltages of different directions and/ormagnitudes are applied to the two electrically isolated substrateregions, according to one embodiment of the present invention.

DETAILED DESCRIPTION OF THE INVENTION, AND PREFERRED EMBODIMENTS THEREOF

In the following description, numerous specific details are set forth,such as particular structures, components, materials, dimensions,processing steps and techniques, in order to provide a thoroughunderstanding of the present invention. However, it will be appreciatedby one of ordinary skill in the art that the invention may be practicedwithout these specific details. In other instances, well-knownstructures or processing steps have not been described in detail inorder to avoid obscuring the invention.

It will be understood that when an element as a layer, region orsubstrate is referred to as being “on” another element, it can bedirectly on the other element or intervening elements may also bepresent. In contrast, when an element is referred to as being “directlyon” another element, there are no intervening elements present. It willalso be understood that when an element is referred to as being“connected” or “coupled” to another element, it can be directlyconnected or coupled to the other element or intervening elements may bepresent. In contrast, when an element is referred to as being “directlyconnected” or “directly coupled” to another element, there are nointervening elements present.

This invention uses a substrate bias voltage to reduce the thresholdvoltage difference between n-FETs and p-FETs contained in a CMOS circuitor a group of CMOS circuits fabricated on SOI substrates and to improvethe performance of the CMOS circuit(s).

It has been discovered by the inventors of the present invention thatsubstrate bias voltages have drastically different impact on the n-FETand p-FET devices. Specifically, a positive substrate bias voltage willdecrease the n-FET threshold voltage but increase the p-FET thresholdvoltage, and a negative substrate bias voltage, on the other hand, willincrease the n-FET threshold voltage but decrease the p-FET thresholdvoltage. Therefore, suitable substrate bias voltages can be applied tothe CMOS circuits to reduce the threshold voltage differences betweenthe n-FET and the p-FET devices. Since the source and drain regions ofthe n-FET and p-FET devices fabricated on a SOI substrate are wellinsulated from the base substrate layer by the intermediate insulatorlayer, applying a bias voltage to the base substrate layer will not haveany deleterious impact on the device operation and performance.

Note that for CMOS circuits formed in bulk substrates, a p-n junction,instead of an intermediate insulator layer, is used for deviceisolation. For example, if the bulk substrate is doped with a p-typedopant species, the n-FET device can be directly fabricated in thisp-substrate, but the pFET needs to be fabricated in an n-type wellformed in the p-substrate. In this manner, the true “device substrate”for the p-FET is n-type, while the true “device substrate” for the n-FETis p-type. Application of a common substrate bias voltage to both then-FET device substrate and the p-FET device substrate will inevitablyresult in an undesired forward bias in the p-n junction formed betweenthe source/drain regions of one of the FETs (either p-type or n-type)and its associated device substrate. Therefore, use of SOI substratesinstead of bulk substrates is more preferred in practicing the presentinvention.

The specific impact of the substrate bias voltages on the thresholdvoltages of the n-FET and p-FET devices in a SOI-CMOS circuit depends onthe specific device design. For example, such an impact is relativelysmall for partially depleted n-FET and p-FET devices, but relativelylarge for fully depleted n-FET and p-FET device SOI-CMOS. Moreover, thethinner the intermediate insulating layer, the larger the impact of suchsubstrate bias voltages.

FIG. 1 shows the channel current (Id) response curves of a fullydepleted n-FET device and a fully depleted p-FET device in a SOI-CMOScircuit, plotted as a function of the gate voltages (Vgs) at differentsubstrate bias voltages. Specifically, the n-FET and p-FET devices bothcontained metallic electrodes or gates, with a gate length (LG) of about60 nm and a drain voltage (V_(DS)) of about 1.2 V. Different substratebias voltages (V_(BB)) of 0 V, −5 V, −10 V, and −15 V were in turnapplied to the SOI-CMOS circuit, and the corresponding Id responsecurves of the n-FET and the p-FET were plotted.

FIG. 2 shows the threshold voltage shifts exhibited by theabove-described fully depleted n-FET and p-FET devices when thesubstrate bias voltages changed from 0 V to −5 V, −10 V, and −15 V. Itis clear that when the substrate bias voltage is 0 V, the thresholdvoltage of the n-FET is about 400 mV smaller than that of the p-FET,because the metallic electrodes used therein had a work function closerto that of an n-type polysilicon than that of a p-type polysilicon. Asmentioned hereinabove, a negative substrate bias voltage can be used toreduce the threshold voltage of the p-FET and to increase the thresholdvoltage of the n-FET. FIG. 2 shows that a substantial threshold voltagebalance between the n-FET and the p-FET was achieved at a substrate biasvoltage of approximately −9 V.

As mentioned hereinabove, the thinner the intermediate insulating layerused in the SOI substrate, the larger an impact of the substrate biasvoltage has over the n-FET and p-FET threshold voltages. The CMOScircuit as described hereinabove was fabricated in an SOI substrate thatcontained a buried insulator layer of about 140 nm thick, and asubstrate bias voltage of approximately −9V is sufficient to achievethreshold voltage balance between the n-FET and the p-FET. If a thinnerburied insulator layer was used, a proportionally smaller substrate biasvoltage could be used to achieve the threshold voltage balance.Typically, for a SOI substrate having a buried insulator layer of about20 nm thick, a substrate bias voltage ranging from more than 0 V toabout ±3 V is sufficient for achieving the threshold voltage balancebetween a fully depleted n-FET and a fully depleted p-FET; for a SOIsubstrate having a buried insulator layer of about 100 nm thick, asubstrate bias voltage ranging from about 0 V to about ±15 V may benecessary for achieving the desired threshold voltage balance.

Further, it has been discovered by the inventors that substrate biasvoltages not only affect the threshold voltages of the n-FET and p-FETdevices in a CMOS circuit, but also improve the overall performance ofsuch a CMOS circuit, by enhancing the operation speed and reducing thestand-by current of such a CMOS circuit.

Specifically, a 65-stage CMOS ring oscillator was used for determiningthe performance improvements effectuated by application of a substratebias voltage. The relative speed enhancements or delay improvements perstage were plotted for the ring oscillator as a function of substratebias voltages at different power supply voltages, as shown in FIG. 3.Peak speed enhancement or delay improvement is achieved by applicationof a substrate bias voltage of about −9 V, and the overall speedenhancements or delay improvements are more significant at lower powersupply voltages. Further, the stand-by currents were also plotted forthe ring oscillator as a function of substrate bias voltages atdifferent power supply voltages, as shown in FIG. 4. Significantreduction of stand-by currents is observed for substrate bias voltagesranging from about −1 V to about −9 V, regardless of the power supplyvoltages.

This experiment confirms the effectiveness of SOI substrate bias voltagein simultaneously maximizing the operation speed of a CMOS circuit andminimizing the stand-by power consumption of such a CMOS circuit.

The implementation of the present invention in a single SOI-CMOS circuitis relatively straightforward. In conventional SOI-CMOS circuit, thesubstrate is either floating or grounded. In the present invention,instead of floating or grounding the substrate, a direct current (DC)voltage is applied to the substrate. The direction of the applied DCvoltage depends on what type of threshold voltage imbalance existsbetween the n-FET and the p-FET devices. If the threshold voltage of then-FET is larger than that of the p-FET, a positive substrate biasvoltage should be applied. If the threshold voltage of the n-FET issmaller than that of the p-FET, a negative substrate bias voltage shouldbe applied.

Further, either a common substrate bias voltage or two or more substratevoltage biases of different directions and/or magnitudes can be appliedto two or more CMOS circuits fabricated on a SOI substrate to reduce thethreshold voltage difference, or more preferably to achieve thresholdvoltage balance, between n-FET and p-FET devices in each of the CMOScircuits. SOI-CMOS structures that each comprise two or more CMOScircuits of the present invention with either a common substrate biasvoltage or two or more substrate voltage biases of different directionsand/or magnitudes applied thereto will now be described in greaterdetail by referring to FIGS. 5-8. Note that in these drawings, which arenot drawn to scale, like and/or corresponding elements are referred toby like reference numerals. It is further noted that in the drawingsonly two CMOS circuits that each comprises one n-FET and one p-FET isshown on a SOI semiconductor substrate. Although illustration is made tosuch an embodiment, the present invention is not limited to theformation of any specific number of CMOS circuits, n-FETs, and p-FETs onthe semiconductor substrate.

Reference is first made to FIG. 5, which shows an SOI substrate 10 thatcomprises, from the bottom to top, a base semiconductor layer 12, aninsulator layer 14, and a semiconductor device layer 16. At least twoCMOS circuits 1 and 2 are fabricated on the semiconductor device layer16. Specifically, the CMOS circuit 1 includes at least one N-FET 22 andat least one p-FET 24, and the CMOS circuit 2 includes at least onen-FET 26 and at least one p-FET 28. The threshold voltage imbalance inthe CMOS circuit 1 is the same as that in the CMOS circuit 2. Therefore,a common substrate bias voltage (V_(BB)) can be applied by a voltageapplicator (not shown) to the base substrate layer 12 for adjusting thethreshold voltages of all four FETs 22, 24, 26, and 28, so as to reducethe threshold voltage difference, or more preferably to achieve athreshold voltage balance, between FETs 22 and 24 in the CMOS circuit 1as well as between FETs 26 and 28 in the CMOS circuit 2. The n-sourcevoltages (Vss1 and Vss2) for both circuits 1 and 2 are preferablymaintained at 0 V. The base substrate layer 12 is preferably doped witheither an n-type or a p-type dopant species. The V_(BB) can be eitherpositive or negative, depending on whether the n-FET threshold voltageis larger or smaller than the p-FET threshold voltage.

In the event that the threshold voltage imbalance in the CMOS circuit 1is different from that in the CMOS circuit 2, substrate bias voltages ofdifferent magnitudes or even different directions may need to be appliedto the CMOS circuits, which requires sufficient isolation between therespective device substrates for CMOS circuits 1 and 2.

For example, if the n-FETs 22 and 26 both have threshold voltages largerthan those of the p-FETs 24 and 28 but by different amounts, positivesubstrate bias voltages of different magnitudes need to be applied tothe CMOS circuits 1 and 2. In this event, n-type wells can be fabricatedin a base substrate layer doped with a p-type dopant species to providethe required substrate isolation while allowing application of thepositive substrate bias voltages.

FIG. 6 shows two n-type wells 11, which are fabricated in a p-doped basesemiconductor layer 12′ and function as respective device substrates forCMOS circuits 1 and 2. A first substrate bias voltage (V_(SB1)>0) of afirst magnitude is applied by a first voltage applicator (not shown) tothe n-type well 11 that is located under CMOS circuit 1 and functions asthe device substrate therefor. A second substrate bias voltage(V_(SB2)>0) of a second, different magnitude is applied by a secondvoltage application (not shown) to the n-type well 11 that is locatedunder CMOS circuit 2 and functions as the device substrate therefor. Thepositive substrate bias voltages apply desired reverse biases, insteadof forward biases, to the diodes formed between the n-type wells 11 andthe p-doped base semiconductor layer 12′, thereby eliminating anysignificant current flow and power consumption in the SOI substrate 10.

For another example, if the n-FETs 22 and 26 both have thresholdvoltages smaller than those of the p-FETs 24 and 28 but by differentamounts, negative substrate bias voltages of different magnitudes needto be applied to the CMOS circuits 1 and 2. In this event, p-type wellscan be fabricated in a base substrate layer doped with an n-type dopantspecies to provide the required substrate isolation while allowingapplication of the negative substrate bias voltages.

FIG. 7 shows two p-type wells 13, which are fabricated in an n-dopedbase semiconductor layer 12″ and function as respective devicesubstrates for CMOS circuits 1 and 2. A first substrate bias voltage(V_(SB1)<0) of a first magnitude is applied by a first voltageapplicator (not shown) to the p-type well 13 that is located under CMOScircuit 1 and functions as the device substrate therefor. A secondsubstrate bias voltage (V_(SB2)<0) of a second, different magnitude isapplied by a second voltage applicator (not shown) to the p-type well 13that is located under CMOS circuit 2 and functions as the devicesubstrate therefor. The negative substrate bias voltages apply desiredreverse biases, instead of forward biases, to the diodes formed betweenthe p-type wells 13 and the n-doped base semiconductor layer 12″,thereby eliminating any significant current flow and power consumptionin the SOI substrate 10.

If one of the n-FETs 22 and 26 has a threshold voltage larger than itscorresponding p-FET (24 or 28), while the other has a threshold voltagesmaller than its corresponding p-FET, substrate bias voltages ofdifferent directions may need to be applied to CMOS circuits 1 and 2. Inthis event, completely isolated device substrates have to be providedfor CMOS circuits 1 and 2.

FIG. 8 shows a SOI substrate 10 that comprises, from the bottom to top,a base semiconductor layer 12, a first insulator layer 18, a firstsemiconductor layer 17, a second insulator layer 14, and a secondsemiconductor layer 16 (i.e., the semiconductor device layer). The firstsemiconductor layer 17 comprises at least two substrate regions 15 thatare electrically isolated from each other. Such electrically isolatedsubstrate regions 15 function as the respective device substrates forCMOS circuits 1 and 2, thereby allowing application of substrate biasvoltages of different directions and/or different magnitudes. Forexample, a first substrate bias voltage (V_(SB1)>0) can be applied by afirst voltage applicator (not shown) to CMOS circuit 1, and a secondsubstrate bias voltage (V_(SB2)<0) can be applied by a second voltageapplicator (not shown) to CMOS circuit 2. The first and second substratebias voltages can have either the same or different magnitudes (i.e.,|V_(SB1)|=|V_(SB2)| or |V_(SB1)≠|V_(SB2)|). Alternatively, the first andsecond substrate bias voltage can have the same direction but differentmagnitudes.

The specific substrate bias voltages applied to the CMOS circuits can beautomatically controlled by a feedback control circuitry coupled withthe respective voltage applicator. The feedback control circuitrymeasures the time delay through a series of inverter stages (i.e., adelay chain), and the output of the feedback control circuitry drivesthe substrate bias voltage until a minimum delay is achieved.

The SOI-CMOS devices of the present invention can be fabricated by anysuitable method well known in the art, with minimal or no modificationsthat can be readily determined by a person ordinarily skilled in theart.

While FIGS. 5-8 illustratively demonstrates exemplary SOI-CMOSstructures, according to specific embodiments of the present invention,it is clear that a person ordinarily skilled in the art can readilymodify the device structure and the process steps illustrated herein,for adaptation to specific application requirements, consistent with theabove descriptions. It should therefore be recognized that the presentinvention is not limited to the specific embodiment illustratedhereinabove, but rather extends in utility to any other modification,variation, application, and embodiment, and accordingly all such othermodifications, variations, applications, and embodiments are to beregarded as being within the spirit and scope of the invention.

1. A semiconductor device comprising: at least one complementarymetal-oxide-semiconductor (CMOS) circuit located on asemiconductor-on-insulator (SOI) substrate, wherein said at least oneCMOS circuit comprises at least one n-FET and at least one p-FET, and atleast one voltage applicator for applying a substrate bias voltage tothe at least one CMOS circuit so as to reduce the difference between thethreshold voltage of the at least one n-FET and the threshold voltage ofthe at least one p-FET by at least 5%.
 2. The semiconductor device ofclaim 1, wherein the at least one n-FET and the at least one p-FETcomprise metallic gate electrodes.
 3. The semiconductor device of claim1, wherein the at least one n-FET comprises an n-doped polysilicon gateelectrode, and the at least one p-FET comprises a p-doped polysilicongate electrode.
 4. The semiconductor device of claim 1, wherein one ofthe at least one n-FET and the at least one p-FET comprises a dopedpolysilicon gate electrode, and wherein the other of the at least onen-FET and the at least one p-FET comprises a metallic gate electrode. 5.The semiconductor device of claim 1, wherein the SOI substrate comprisesa base semiconductor layer, over which an insulator layer and asemiconductor device layer are located, and wherein two or more CMOScircuits are located on the semiconductor device layer, each of saidCMOS circuits comprising at least one n-FET and at least one p-FET. 6.The semiconductor device of claim 5, wherein a common substrate biasvoltage of either positive or negative direction is applied by the atleast one voltage applicator to the base semiconductor layer forachieving reducing the threshold voltage difference between the at leastone n-FET and the at least one p-FET by at least 5% in each of said twoor more CMOS circuits.
 7. The semiconductor device of claim 5, whereinthe base semiconductor layer of the SOI substrate is doped with a p-typedopant species and comprises two or more n-type wells therein, each ofwhich is located under one of the CMOS circuits, and wherein saidsemiconductor device comprises two or more voltage applicators forapplying two or more positive substrate bias voltages of differentmagnitudes to said two or more n-type wells to reduce the thresholdvoltage difference between the at least one n-FET and the at least onep-FET by at least 5% in each of the CMOS circuits.
 8. The semiconductordevice of claim 5, wherein the base semiconductor layer of the SOIsubstrate is doped with a n-type dopant species and comprises two ormore p-type wells therein, each of which is located under one of theCMOS circuits, and wherein said semiconductor device comprises two ormore voltage applicators for applying two or more negative substratebias voltages of different magnitudes to said two or more p-type wellsto reduce the threshold voltage difference between the at least onen-FET and the at least one p-FET by at least 5% in each of the CMOScircuits.
 9. The semiconductor device of claim 1, wherein the SOIsubstrate comprises, from bottom to top, a base semiconductor layer, afirst insulator layer, a first semiconductor layer, a second insulatorlayer, and a second semiconductor layer, wherein said firstsemiconductor layer comprises two or more substrate regions that areelectrically isolated from each other, wherein two or more CMOS circuitsare fabricated on the second semiconductor layer, wherein each of saidCMOS circuits comprises at least one n-FET and at least one p-FET and islocated over one of said isolated substrate regions, and wherein saidsemiconductor device comprises two or more voltage applicators forapplying two or more substrate bias voltages of different directionsand/or different magnitudes to said two or more isolated substrateregions in the first semiconductor layer for reducing the thresholdvoltage difference between the at least one n-FET and the at least p-FETby at least 5% in each of the CMOS circuits.
 10. The semiconductordevice of claim 1, wherein the at least one voltage applicator iscoupled with a feedback circuitry for controlling the substrate biasvoltage applied to the at least one CMOS circuit.